FAQ

Cleanroom Classifications acc. to US FEDERAL STANDARD 209E

 

Metric

Imperial

0.1 μm

0.2 μm

0.3 μm

0.5 μm

5 μm

M

English

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

(m3)

(ft3)

1

 

350

9.91

75.7

2.14

30.9

0.875

10.0

0.283

 

 

1.5

1

1,240

35.0

265

7.50

106

3.00

35.3

1.00

 

 

2

 

3,500

99.1

757

21.4

309

8.75

100

2.83

 

 

2.5

10

12,400

350

2,650

75.0

1,060

30.0

353

10.0

 

 

3

 

35,000

991

7,570

214

3,090

87.5

1,000

28.3

 

 

3.5

100

 

 

26,500

750

10,600

300

3,530

100

 

 

4

 

 

 

75,700

2,140

30,900

875

10,000

283

 

 

4.5

1,000

 

 

 

 

 

 

35,300

1,000

247

7.00

5

 

 

 

 

 

 

 

100,000

2,830

618

17.5

5.5

10,000

 

 

 

 

 

 

353,000

10,000

2,470

70.0

6

 

 

 

 

 

 

 

1,000,000

28,300

6,180

175

6.5

100,000

 

 

 

 

 

 

3,350,000

100,000

24,700

700

7

 

 

 

 

 

 

 

10,000,000

283,000

61,800

1,750