FAQ
CLEANROOM CLASSIFICATIONS ACC. TO ISO 14644-1:2015 New ISO 14644-1:2015
|
Maximum concentration limits (particles M3 of air) for particles equal to and larger than the considered sizes shown below: (a) |
||||||
|
ISO Classification Number(N) |
0,1 μm |
0,2 μm |
0,3 μm |
0,5 μm |
1 μm |
5 μm |
|
ISO 1 |
b 10 |
d |
d | d | d | e |
|
ISO 2 |
100 |
24 |
10 |
d |
d | e |
|
ISO 3 |
1 000 |
237 |
102 |
35 |
d |
e |
|
ISO 4 |
10 000 |
2 370 |
1 020 |
352 |
83 |
e |
|
ISO 5 |
100 000 |
23 700 |
10 200 |
3 520 |
832 |
d,e,f |
|
ISO 6 |
1 000 000 |
237 000 |
102 000 |
35 200 |
8 320 |
293 |
|
ISO 7 |
c | c | c |
352 000 |
83 200 |
2 930 |
|
ISO 8 |
c | c | c |
3 520 000 |
832 000 |
29 300 |
|
ISO 9 |
c | c | c |
35 200 000 |
8 320 000 |
293 000 |
5.0µm should be zero according to ISO/DIS 14644-1.2 Table 1 notes;
d) Sampling and statistical limitations for particles in low concentrations make classification inappropriate
e) ... Greater than 1 micron particles make classification at this particle size inappropriate due to potential particle losses in sampling system
f) Specify particle size in association with ISO Class 5, the marcoparticle discriptor M may be adapted.