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Cleanroom Classifications acc. to ISO 14644-1:2015

Maximum allowable concentrations (particles/m3) for particles equal to and greater than the considered sizes

Particle size

 

> 0,1 μm

> 0,2 μm

> 0,3 μm

> 0,5 μm

> 1 μm

> 5 μm

ISO Class 1

10

 

       

ISO Class 2

100

24

10

 

   

ISO Class 3

1 000

237

102

35

 

 

ISO Class 4

10 000

2 370

1 020

352

83

 

ISO Class 5

100 000

23 700

10 200

3 520

832

 

ISO Class 6

1 000 000

237 000

102 000

35 200

8 320

293

ISO Class 7

     

352 000

83 200

2 930

ISO Class 8

     

3 520 000

832 000

29 300

ISO Class 9

     

35 200 000

8 320 000

293 000