FAQ
CLEANROOM CLASSIFICATIONS ACC. TO ISO 14644-1:2015 New ISO 14644-1:2015
Maximum concentration limits (particles M3 of air) for particles equal to and larger than the considered sizes shown below: (a) | ||||||
ISO Classification Number(N) | 0,1 μm | 0,2 μm | 0,3 μm | 0,5 μm | 1 μm | 5 μm |
ISO 1 | b 10 | d | d | d | d | e |
ISO 2 | 100 | 24 | 10 | d | d | e |
ISO 3 | 1 000 | 237 | 102 | 35 | d | e |
ISO 4 | 10 000 | 2 370 | 1 020 | 352 | 83 | e |
ISO 5 | 100 000 | 23 700 | 10 200 | 3 520 | 832 | d,e,f |
ISO 6 | 1 000 000 | 237 000 | 102 000 | 35 200 | 8 320 | 293 |
ISO 7 | c | c | c | 352 000 | 83 200 | 2 930 |
ISO 8 | c | c | c | 3 520 000 | 832 000 | 29 300 |
ISO 9 | c | c | c | 35 200 000 | 8 320 000 | 293 000 |
5.0µm should be zero according to ISO/DIS 14644-1.2 Table 1 notes;
d) Sampling and statistical limitations for particles in low concentrations make classification inappropriate
e) ... Greater than 1 micron particles make classification at this particle size inappropriate due to potential particle losses in sampling system
f) Specify particle size in association with ISO Class 5, the marcoparticle discriptor M may be adapted.